High-speed wavefront control using MEMS micromirrors
نویسنده
چکیده
In this paper, one type of segmented MEMS mirror is evaluated in detail, particularly with regard to its usable actuation bandwidth. In many emerging applications it is important to operate devices at control bandwidths well above 10kHz. In this paper it is demonstrated that careful design and environmental control can permit actuator bandwidths exceeding 100 kHz. Alternatively, it will be shown that viscous air damping can limit MEMS device bandwidth to less than 10 kHz.
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تاریخ انتشار 2005